Semitool, Tokyo Electron Settle Patent Dispute

Law360, New York (October 20, 2003, 12:00 AM EDT) -- Chip equipment makers Semitool and Tokyo Electron have reached an amicable settlement in a patent lawsuit in the United States District Court for the Northern District of California, Semitool said in a statement.

Both parties have dismissed their respective patent claims without the exchange of any monetary compensation. All other terms of the settlement are confidential, Semitool said.

Semitool designs, develops, manufactures and supports high-performance, single-wafer and batch wet chemical processing systems for use in the fabrication of semiconductor devices.

Tokyo Electron (TEL) engineers, manufactures, sells,...
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