Jusung Sues Applied Materials Unit Over LCD Process Patent

Law360, New York (September 6, 2004, 12:00 AM EDT) -- South Korean chip equipment maker Jusung Engineering Co. has filed a patent infringement lawsuit against AKT Inc., a subsidiary of U.S. rival Applied Materials, over a state-of-the-art semiconductor making process used for mass-producing liquid crystal displays (LCDs).

The complaint, filed with a South Korean court, involves the so-called plasma enhanced chemical vapor deposition (PECVD) process.

In the PECVD process, one or more gaseous reactors are used to form a solid insulating or conducting layer on the surface of a wafer enhanced by the use of a...
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