Law360, New York (August 04, 2011, 7:24 PM ET) -- Nanometrics Inc. sued KLA-Tencor Corp. on Wednesday in Delaware federal court, alleging infringement of two patents for tools used in making semiconductors.
Nanometrics claims that KLA-Tencor's Archer brand of overlay registration metrology systems, which are used in semiconductor fabrication, infringe its patents.
"[KLA-Tencor’s] acts of infringement have been willful, deliberate and in reckless disregard of Nanometrics' patent rights, and will continue unless enjoined by this court," the complaint said.
According to the suit, KLA-Tencor has been aware of Nanometrics' patents since shortly after they were issued....
Nanometrics Sues KLA Over Semiconductor Patents
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