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August 03, 2011
Nanometrics Incorporated v. KLA-Tencor Corporation
Case Number:
1:11-cv-00685
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View recent docket activity
Reflects complaints, answers, motions, orders and trial notes entered from Jan. 1, 2011.
Additional or older documents may be available in Pacer.
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August 04, 2011
Nanometrics Sues KLA Over Semiconductor Patents
Nanometrics Inc. sued KLA-Tencor Corp. on Wednesday in Delaware federal court, alleging infringement of two patents for tools used in making semiconductors.
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