Rudolph Hits Camtek With 2nd Chip Inspection IP Suit

Law360, New York (June 2, 2010, 6:06 PM EDT) -- Rudolph Technologies Inc. and a subsidiary have lodged another patent infringement suit against rival Camtek Ltd. over an automated inspection system for detecting defects in semiconductor wafers, seeking to add to a $6.8 million jury verdict won in 2009.

The patent-in-suit, U.S. Patent Number 7,729,528, was issued Tuesday, the same day Rudolph filed its complaint in the U.S. District Court for the District of Minnesota. The patent is titled “Automated wafer inspection system and a process of performing such inspection” and covers continuous inspection of wafers...
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