Nanometrics Sues KLA Over Semiconductor Patents
Nanometrics claims that KLA-Tencor's Archer brand of overlay registration metrology systems, which are used in semiconductor fabrication, infringe its patents.
"[KLA-Tencor’s] acts of infringement have been willful, deliberate and in reckless disregard of Nanometrics' patent rights, and will continue unless enjoined by this court," the complaint said.
According to the suit, KLA-Tencor has been aware of Nanometrics' patents since shortly after they were issued....
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