Varian Semiconductor Sues Nissin Over Chip Patents
The lawsuit, filed in the U.S. District Court for the Western District of Texas, asks the court to issue an injunction and to order Nissin to pay damages to Varian Semiconductor.
Varian Semiconductor asserts that Nissin's medium current ion implanter infringes Varian Semiconductor's patents for "Ion Beam Scanning Method and Apparatus" and "High Speed Movement of Workpieces in Vacuum Processing."
The ion beam implanter is used to...
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