Case Number:

IPR2024-00033

Case Type:

IPR

Status:

Final Written Decision

Petitioner:

Lam Research Corp.

1. Filed: October 16, 2023 00:00

   Coverage

   1. April 21, 2025

      PTAB Invalidates Inpria Patent But Allows It To Amend Claims

      The Patent Trial and Appeal Board has invalidated all the challenged claims in an Inpria Corp. patent related to extreme ultraviolet light semiconductor processing, but allowed the company the opportunity to amend its claims.

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